Gas pressure sensor

Measuring and testing – Fluid pressure gauge – Vibration type

Patent

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Details

310370, G01L 902, H01L 4108

Patent

active

047036575

ABSTRACT:
A gas pressure sensor comprises a contour piezoelectric vibrator and the pressure of gas is detected by measuring an equivalent series resistance of the vibrator which is surrounded by the gas whose pressure is to be detected.

REFERENCES:
patent: 3902355 (1975-09-01), Weisser
patent: 4498344 (1985-02-01), Dinger
patent: 4509970 (1985-05-01), Dinger

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