Gas pressure gauge and pressure measuring method

Details Gas pressure gauge and pressure measuring method Gas pressure gauge and pressure measuring method

1989-12-14

1991-02-26

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73755, 310338, 310370, G01L 1100, G01L 2112

Patent

active

049952641

ABSTRACT:
A process for measuring pressure, preferably vacuum is described. The measuring signals from a heat conduction gauge and the measuring signals from a gas friction gauge are processed to a common measuring signal preferably by multiplication. They are linearly superimposed or added. The heat conduction gauge is preferably a Pirani gauge and the gas friction gauge is preferably a tuning fork quartz gauge.

REFERENCES:
patent: 3064478 (1962-11-01), Schafer
patent: 4507970 (1985-04-01), Dinger
patent: 4747311 (1988-05-01), Hojoh
Design and Testing of a Quarty Friction Vacuum Gauge Using a Self-Oscillating Circuit by M. Hirata et al., 1987, American Vacuum Society, pp. 2393-2396.
Frequency Dependence of a Quartz Oscillator on Gas Pressure by K. Kokubuin et al., Jun. 3, 1985, 1985 American Vacuum Soc.
Unified Formula Describing the Impedance Dependence of a Oscillator on Gas Pressure by K. Kokubun et al., Jan. 5, 1987, 1985 American Vacuum Society.

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