Gas pressure gage

Details Gas pressure gage Gas pressure gage

1987-03-10

1988-05-31

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73714, 73756, 324460, G01L 1100

Patent

active

047473118

ABSTRACT:
Regarding a gas pressure gage for measuring a gas pressure in a vacuum chamber of a semiconductor element manufacturing apparatus, or the like, the present invention has made it possible to attain a small-sized and unitary gas pressure gage and to implement a thorough measurement of gas pressure from the atmospheric pressure to a high vacuum of about 10.sup.-10 Torr, by mounting both a mechanical vibrator type pressure gage and an ionization type pressure gage on a flange provided for fitting a chamber and by providing a control circuit for making the former gage operate in a low-vacuum region and the latter in a high-vacuum region.

REFERENCES:
patent: 3064478 (1962-11-01), Schafer
patent: 3902355 (1975-09-01), Weisser
patent: 4314205 (1982-02-01), Paitich

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