Coating apparatus – Gas or vapor deposition – With treating means
Patent
1993-11-30
1995-12-05
Breneman, R. Bruce
Coating apparatus
Gas or vapor deposition
With treating means
156345, 20429811, 20429824, 118718, 118719, C23C 1600
Patent
active
054725097
ABSTRACT:
An apparatus for the treatment of articles with a polymerizate-producing gas plasma is disclosed wherein a set of movable film liners is used to shield the walls of a gas-plasma-containing reaction tunnel from excessive build-up of polymerizate deposits. In an operation involving continuous gas plasma coating of a film, fiber, fabric, tubing or string of workpieces, at least 75 to 90 percent of potential wall deposits are removable by the set of film liners.
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Dynamic Debris Removal in High Power Electron Beam Personalization, IBM Technical Disclosure Bulletin, vol. 33, No. 12, May 1991.
Breneman R. Bruce
Chang Joni Y.
NeoMecs Incorporated
Petersen Robert J.
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