Gas phase preparation of aluminum nitride

Details Gas phase preparation of aluminum nitride Gas phase preparation of aluminum nitride

1988-01-27

1989-09-12

Doll, John

Chemistry of inorganic compounds

Nitrogen or compound thereof

Binary compound

423290, 501 96, 556176, 564 9, C04B 3558, C01B 2106

Patent

active

048658308

ABSTRACT:
Admixing an aluminum alkyl, and optionally a boron compound, with a hydride of nitrogen in the gas phase and maintaining a gas phase temperature, optionally in the presence of a carrier gas, and producing aluminum nitride alone or in admixture with a precursor thereof or boron nitride or both.

REFERENCES:
patent: 4519966 (1985-05-01), Aldinger et al.
patent: 4746501 (1988-05-01), Maya
patent: 4764489 (1988-08-01), Bolt
patent: 4783430 (1988-11-01), Su

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