Fluid handling – Systems – With flow control means for branched passages
Reexamination Certificate
2007-11-27
2007-11-27
Fox, John (Department: 3753)
Fluid handling
Systems
With flow control means for branched passages
Reexamination Certificate
active
11219101
ABSTRACT:
A gas-panel manifold for use in a gas-panel assembly mounted on a support is disclosed. The manifold includes (i) a plurality of two-port stations at which gas components, including one or more gas-valve components, can be mounted, (II) at least one station having a port for accommodating an overhead fluid connection, and (iii) internal fluid connections between individual stations in the manifold, for carrying a gas from one gas component mounted on the assembly to another, and for carrying gas from said one station to one of the two ports at a station which a valved gas component is to be mounted. The fluid connections have a cross-sectional area that is larger than can be accommodated by a three-port station of the type used for mounting a three-port valved gas component.
REFERENCES:
patent: 4008736 (1977-02-01), Wittmann-Liebold et al.
patent: 4807660 (1989-02-01), Aslonion
patent: 5361805 (1994-11-01), Moyeux
patent: 5368062 (1994-11-01), Okumura et al.
patent: 5488915 (1996-02-01), McNeill
patent: 5488925 (1996-02-01), Kumada
patent: 5529088 (1996-06-01), Asou
patent: 5605179 (1997-02-01), Strong et al.
patent: 5713582 (1998-02-01), Swensen et al.
patent: 5730448 (1998-03-01), Swensen et al.
patent: 5735532 (1998-04-01), Nolan et al.
patent: 5735533 (1998-04-01), Nolan et al.
patent: 5836355 (1998-11-01), Markulec et al.
patent: 5860676 (1999-01-01), Brzezicki et al.
patent: 5992463 (1999-11-01), Redemann et al.
patent: 6039360 (2000-03-01), Ohmi et al.
patent: 6085783 (2000-07-01), Hollingshead
patent: 6123340 (2000-09-01), Sprafka et al.
patent: 6142539 (2000-11-01), Redemann et al.
patent: 6189570 (2001-02-01), Redemann et al.
patent: 6192938 (2001-02-01), Redemann et al.
patent: 6283155 (2001-09-01), Vu
patent: 6394138 (2002-05-01), Vu et al.
patent: 6435215 (2002-08-01), Redemann et al.
patent: 6474700 (2002-11-01), Redemann et al.
patent: 6502601 (2003-01-01), Eidsmore et al.
patent: 6546961 (2003-04-01), Fukushima
patent: 6615871 (2003-09-01), Ohmi et al.
patent: 6629546 (2003-10-01), Eidsmore et al.
patent: 6640835 (2003-11-01), Rohrberg et al.
patent: 6644353 (2003-11-01), Eidsmore
patent: 6776193 (2004-08-01), Eidsmore
patent: 7048008 (2006-05-01), Milburn
patent: 2002/0000256 (2002-01-01), Eldsmore et al.
patent: 2004/0112446 (2004-06-01), Eldsmore et al.
patent: 2005/0056330 (2005-03-01), Eldsmore et al.
patent: 26 30 050 (1978-01-01), None
patent: 0 637 712 (1995-02-01), None
patent: 0 754 896 (1997-01-01), None
patent: 0 715 112 (1997-05-01), None
patent: 0 816 731 (1998-01-01), None
patent: 0 837 278 (1998-04-01), None
patent: 0 844 424 (1998-05-01), None
patent: 0 845 623 (1998-06-01), None
patent: 0 859 155 (1998-08-01), None
patent: 0 905 383 (1999-03-01), None
patent: 0 908 929 (1999-04-01), None
patent: 1 239 203 (2002-09-01), None
patent: WO99/45302 (1999-09-01), None
Uchisawa, O. et al., “Compact Gas Control System”, 18thWorkshop on ULSI Ultra Clean Technology, Physics and Chemistry of Specialty Gases for Advanced Semiconductor Processings, pp. 15-24, 1992.
Dehlinger Peter J.
Fox John
Perkins Coie LLP
Ultra Clean Holdings, Inc.
LandOfFree
Gas-panel assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Gas-panel assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas-panel assembly will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3821748