Gas-panel assembly

Details Gas-panel assembly Gas-panel assembly

2007-05-08

2007-05-08

Fox, John (Department: 3753)

Fluid handling

Systems

With flow control means for branched passages

Reexamination Certificate

active

11105730

ABSTRACT:
A fluid manifold and components for constructing the fluid manifold having a plurality of separate fluid-flow pathways are disclosed. The manifold includes a plurality of pipe modules which form the fluid-flow pathways and a plurality of block modules which can be placed together in various configurations with the pipe modules to form the fluid manifold. The pipe modules have terminal collars or flanges by which they are supported within the block modules, and the block module construction allows modules to be removed and replaced without removal of adjacent block or pipe modules.

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Uchisawa, O. et al., “Compact Gas Control System”, 18thWorkshop on ULSI Ultra Clean Technology, Physics and Chemistry of Specialty Gases for Advanced Semiconductor Processings, pp. 15-24, 1992.

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