Fluid handling – Systems – With flow control means for branched passages
Reexamination Certificate
2008-01-22
2008-01-22
Fox, John (Department: 3753)
Fluid handling
Systems
With flow control means for branched passages
Reexamination Certificate
active
07320339
ABSTRACT:
Modular components for use in a gas-panel assembly of the type having two or more gas-panel sticks mounted on a support, stick being composed of a manifold having a plurality of gas components mounted thereon, and internal fluid connections between individual components carried on each manifolds, are disclosed. The components include one or more modular blocks that can be removably placed within or adjacent an end of each manifold, an internal pipe module that provides an internal fluid passageway between one of the gas components carried on a manifold and a support on an adjacent modular block unit, and one or more external pipe modules that provide an external fluid passageway between surface ports formed in the modular block, for connecting adjacent manifolds in the gas assembly.
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Dehlinger Peter J.
Fox John
Perkins Coie LLP
Ultra Clean Holdings, Inc.
LandOfFree
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