Pipe joints or couplings – Packed – Gasket retainer
Patent
1999-08-10
2000-11-07
Fox, John
Pipe joints or couplings
Packed
Gasket retainer
277630, F16L 1700
Patent
active
061425397
ABSTRACT:
A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.
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CKD Corporation Brochure, "Integrated Valves and MFC with Metal Seal Rings," 5 pages, undated.
Redemann Eric J.
Vu Kim N.
Fox John
Unit Instruments, Inc.
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