Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate
2005-05-31
2005-05-31
Porta, David (Department: 2878)
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
C250S338400, C356S051000
Reexamination Certificate
active
06900439
ABSTRACT:
Components of sampled gases are analyzed by a Fourier transform infrared spectrophotometer28. It is determined whether or not the analyzed gases include at least one kind of specific gases equal to or more than a predetermined quantity. In a case where mixed gases include at least one kind of the specific gases equal to or more than the predetermined quantity, a controller30supplies an operation display monitor31with a signal indicating leakage of the kind of the specific gases. Hence, it is possible to realize detection by kind of the gases with high accuracy irrespective of the kind of leaked gas.
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Gotoda Kazunori
Komiyama Kiyoshi
Watanabe Shin-ichi
Sung Christine
Tokyo Electron Limited
Tomoe Shokai Co., Ltd.
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