Gas laser oscillator and method of measuring laser gas...

Details Gas laser oscillator and method of measuring laser gas... Gas laser oscillator and method of measuring laser gas...

2007-02-01

2009-02-24

Rodriguez, Armando (Department: 2828)

Coherent light generators

Particular active media

Gas

C372S055000, C372S058000

Reexamination Certificate

active

07496126

ABSTRACT:
A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a laser gas replacement measuring device. The control device makes a first measurement and a second measurement of the pressure in the gas chamber by a gas pressure measuring device at a predetermined time interval during the vacuuming or purging of the gas chamber, and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements.

REFERENCES:
patent: 5088101 (1992-02-01), Irie et al.
patent: 62-118587 (1987-05-01), None
patent: 1-158787 (1989-06-01), None
patent: 7-176809 (1995-07-01), None
patent: 11-87809 (1999-03-01), None
patent: 2002-319724 (2002-10-01), None
European Search Report dated Jun. 4, 2007 issued in European Application No. 07002222.3-2222.

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