Gas laser electrode, laser chamber employing the electrode,...

Details Gas laser electrode, laser chamber employing the electrode,... Gas laser electrode, laser chamber employing the electrode,...

2006-02-28

2006-02-28

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular active media

Gas

C372S057000, C372S060000

Reexamination Certificate

active

07006546

ABSTRACT:
Provided is a gas laser electrode in which a stable laser output can be obtained by inhibiting the deterioration of the electrode (discharge characteristics). In an anode3, a dielectric material4is applied on the surface of a discharging portion3ain order to inhibit the deterioration of the electrode. Used as a dielectric material4may be, for example, fluorides such as calcium fluoride and strontium fluoride. Further, the dielectric material4is of a thickness (in a range of 0.005 mm˜1.5 mm, preferably 0.1 mm˜1 mm, for example) sufficient to prevent the erosion of halogen gas in the discharging portion3aof the anode3and to secure a conductivity thereof, whereby it is enabled to form mono-fluoride evenly in extreme precision.

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