Coherent light generators – Particular active media – Gas
Patent
1989-02-22
1990-09-11
Gonzalez, Frank
Coherent light generators
Particular active media
Gas
372 33, H01S 322
Patent
active
049568469
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to a gas laser device for effecting a laser oscillation while circulating a laser gas, and more specifically, to a gas laser device from which air is exhausted from a pipe by a specific sequence when a gas cylinder of the device is replaced.
BACKGROUND ART
A gas laser device uses a special laser gas supplied from a laser gas supply unit and exhausts a laser gas degraded by an electric discharge through a gas exhaust unit, and accordingly, a gas cylinder in the laser gas supply unit must be replaced at predetermined intervals. At this time, a laser gas is introduced from the external laser gas supply unit to fill a laser oscillator with a predetermined amount of the laser gas after the interior of the laser oscillator has been exhausted by the gas exhaust unit. In general, the sequence thereof is such that a valve disposed in the vicinity of the laser oscillator is closed when the gas cylinder is replaced, and is opened when the laser gas is introduced.
However, when the empty gas cylinder is to be replaced with a full one, air enters a pipe disposed between the laser gas supply unit and the valve on the laser oscillator side, and if the gas laser device is operated in this state, a laser gas containing air is introduced into the laser oscillator, and thus a problem arises in that the laser output is reduced and becomes unstable.
DISCLOSURE OF THE INVENTION
An object of the present invention is to solve the above problem and to provide a gas laser device in which, when a gas cylinder or the like is to be replaced, air in a pipe is exhausted in a specific sequence.
To solve the above problem, in accordance with the present invention, there is provided a gas laser device for effecting a laser oscillation while circulating a laser gas, comprising:
a laser gas supply unit;
a gas supply valve provided at an outlet of the laser gas supply unit;
an exhaust unit for exhausting a gas in a discharge tube;
a sequence start means for starting an exhaust sequence;
an exhaust sequence means for exhausting air after closing the gas supply valve, introducing a laser gas into a laser oscillator by opening the gas supply valve after the laser oscillator has been brought to a vacuum state, and effecting vacuum exhausting of the laser oscillator after closing the gas supply valve.
When the gas cylinder or the like is replaced and air enters a pipe, first the pipe is exhausted and then a laser gas is introduced into the oscillator. Then, the gas supply valve is closed and a vacuum exhausting is effected. This arrangement ensures that air is fully exhausted from the oscillator.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a block diagram of an embodiment of the present invention; and
FIG. 2 is a flowchart of an exhaust sequence.
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of the present invention will be hereinafter described in detail with reference to the drawings.
FIG. 1 is a block diagram of an embodiment of the present invention, wherein 1 designates a discharge tube, 2 designates a total reflection mirror, 3 designates an output coupling mirror, and 4 designates a Roots blower for circulating a laser gas. A not shown high-frequency power is applied to the discharge tube 1 to excite an electric discharge in the discharge tube 1 and output a laser beam. Designated at 5 is a laser gas supply unit including a gas cylinder therein; designated at 6 is a gas supply valve which is opened and closed by a control unit to be described later; designated at 7 is a pressure sensor for detecting a gas pressure in the discharge tube 1; designated at 8 is an exhaust valve; and designated at 9 is an exhaust unit. The laser gas is supplied from the laser gas supply unit 5 and the laser gas degraded by the electric discharge in the discharge tube 1 is exhausted by the exhaust unit 9. Therefore, when the gas laser device has been operated for a certain period of time, the gas cylinder in the laser gas supply unit 5 must be replaced.
Designated at 10 is the control unit for co
REFERENCES:
patent: 4718071 (1988-01-01), Steffen
Fanuc Ltd.
Gonzalez Frank
Morse Susan S.
LandOfFree
Gas laser device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Gas laser device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas laser device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1189634