Gas injection system

Details Gas injection system Gas injection system

1993-09-17

1995-07-25

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

156345, 20429833, 20429807, C23C 1600

Patent

active

054358507

ABSTRACT:
A gas injection system employs a crucible having a plurality of cylindrical bores within which gas is generated and a central passage leading to a dispensing nozzle. A chamber between the crucible bores and the central passage is sealed by a flexible membrane which is centrally clamped to a valve actuating rod that can be moved longitudinally via flexure of the membrane. A region behind the flexible membrane is sealed and vented to the system vacuum chamber whereby the enclosure within which the gas is generated is isolated.

REFERENCES:
patent: 4203554 (1980-05-01), Zimmer
patent: 4851097 (1989-07-01), Hattori
patent: 4874459 (1989-10-01), Coldren
patent: 4874460 (1989-10-01), Nakagawa
patent: 4930439 (1990-06-01), Sato et al.
patent: 4976843 (1990-12-01), Ward
patent: 5188705 (1993-02-01), Swanson et al.
patent: 5294057 (1994-03-01), Hamilton

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