Gas friction vacuum meter and method of making measuring body

Details Gas friction vacuum meter and method of making measuring body Gas friction vacuum meter and method of making measuring body

1981-05-14

1983-08-02

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

G01L 700

Patent

active

043959148

ABSTRACT:
A rotary measuring body for a gas-friction vacuum meter has its surface formed with a macroscopic roughness which provides a gas-friction coefficient minimally affected by the microscopic roughness of the surface. As a result, the output signal and sensitivity of the vacuum meter is high and is less susceptible to change as a result of surface corrosion.

REFERENCES:
patent: 2691306 (1954-10-01), Beams et al.
patent: 3041482 (1962-06-01), Beams
"Scientific Foundations of Vacuum Technique", Wiley, New York, 1962, pp. 254, 256.
Fremery and Boden, "Active Permanent Magnet Suspension for Scientific Instruments", Journal of Physics E Scientific Instruments, Feb. 1978, vol. 11, pp. 97-184.
Comsa, Fremery, Lindenau, "Tangential Momentum Transfer in Spinning Rotor Molecular Gauges", Proc. 7th Intern. Vac. Congr. & 3rd Intern. Conf. Solid Surfaces, (Vienna, 1977), pp. 157-160.

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