Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent
1990-07-19
1991-09-24
Look, Edward K.
Rotary kinetic fluid motors or pumps
Smooth runner surface for working fluid frictional contact
415914, 417366, F01D 100
Patent
active
050510606
ABSTRACT:
A gas friction pump has an inlet arranged to be coupled to a vessel to be evacuated; an outlet and an outlet-side pumping stage formed of a helical gas pumping channel. The pump further has a scavenging gas inlet circumferentially surrounding the helical gas pumping channel for exposing the channel to a scavenging gas.
REFERENCES:
patent: 4273263 (1981-06-01), Voegele et al.
patent: 4734018 (1988-03-01), Taniyama et al.
patent: 4806074 (1989-02-01), Burger et al.
Fleischmann Frank
Kabelitz Hans-Peter
Kriechel Hans
Muhlhoff Martin
Leybold Aktiengesellschaft
Look Edward K.
Nguyen Hoang
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