Gas flow type angular velocity sensor and method of constructing

Details Gas flow type angular velocity sensor and method of constructing Gas flow type angular velocity sensor and method of constructing

1992-05-29

1995-08-08

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

29595, G01P 900

Patent

active

054388716

ABSTRACT:
A gas flow type angular velocity sensor comprising two semiconductor substrates wherein only the first semiconductor substrate is provided with a groove etched thereon constituting the gas path and the second semiconductor substrate is provided with paired heat wires formed thereon. The two semiconductor substrates are coupled and bonded to each other to form the sensor body.

REFERENCES:
patent: 4548078 (1985-10-01), Bohrer et al.
patent: 4934190 (1990-06-01), Lee
patent: 5107707 (1992-04-01), Takahashi et al.

Affiliated with

Also associated with

Rating

Gas flow type angular velocity sensor and method of constructing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gas flow type angular velocity sensor and method of constructing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas flow type angular velocity sensor and method of constructing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-964874