Gas flow measurement apparatus and method for EVU light source

Details Gas flow measurement apparatus and method for EVU light source Gas flow measurement apparatus and method for EVU light source

2006-07-25

2006-07-25

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Reexamination Certificate

active

07080563

ABSTRACT:
A gas flow measurement apparatus measures flow of gas emitted from an EUV light source in a light source chamber that accommodates the EUV light source, and includes an absorber that receives light emitted from the EUV light source and introduced into the gas flow measurement apparatus.

REFERENCES:
patent: 6232613 (2001-05-01), Silfvast et al.
patent: 6590959 (2003-07-01), Kandaka et al.
patent: 09-320792 (1997-12-01), None

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