Gas flow controller

Details Gas flow controller Gas flow controller

1993-03-08

1994-07-19

Schwadron, Martin P.

Fluid handling

Systems

Flow path with serial valves and/or closures

137501, 13761419, F16K 31365, F16K 3104

Patent

active

053299663

ABSTRACT:
There is disclosed a system for delivering gas at a predetermined rate of flow, including a diaphgram type flow controller, a pressure regulator for providing a constant flow of gas to the flow controller, and a microprocessor controlled stepper motor utilizing an optical encoder to adjust the rate of flow of a gas leaving the controller without having to use a gas flow measurement device to monitor the flow rate.

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