Gas flow control device for high purity, highly corrosive gas se

Fluid handling – Line condition change responsive valves – With separate connected fluid reactor surface

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Details

137375, 13750542, 137557, G05D 1606

Patent

active

060035455

ABSTRACT:
A gas flow control device is provided in which a regulator body has an inlet bore and an outlet bore extending therein, into which inlet and outlet sleeves having highly polished inner surfaces are secured, with the inlet and outlet sleeves further having connected thereto, at an exterior of the regulator body, connectors for an inlet line, an inlet pressure gauge, an outlet line and and outlet pressure gauge. The inlet and outlet sleeves are made of corrosion-resistant tubing, as are the connectors, in a preferred embodiment.

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