Gas separation – Means within gas stream for conducting concentrate to collector
Patent
1989-05-22
1990-02-20
Hart, Charles
Gas separation
Means within gas stream for conducting concentrate to collector
55502, 55523, B01D 3920
Patent
active
049023144
ABSTRACT:
Disclosed herein is a gas filter particularly suitable for the filtration of dry gases used in the manufacture of the semiconductors. The gas filter comprises a ceramic honeycomb structural body with numerous gas flow holes and a fine ceramic film coated onto the inner surfaces of the gas flow holes. Filtration is performed by passing the gas to be filtered from the outer peripheral surface of the honeycomb structural body to the gas flow holes.
REFERENCES:
patent: 3937015 (1976-02-01), Akado et al.
patent: 4416675 (1983-11-01), Montierth
patent: 4419108 (1983-12-01), Frost et al.
patent: 4568595 (1986-02-01), Morris
Publication entitled "Ceraflo Asymmetric Ceramic Microfilters" by Norton Company.
Mizukami Hiroshi
Tukazaki Hideo
Hanson Donald W.
Hart Charles
Mizukami Hiroshi
Nakajima Hidetoshi
Watanabe Kuniaki
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