Gas filling method and facility

Fluent material handling – with receiver or receiver coacting mea – Filling or refilling of dispensers

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141 2, 141 3, 141 4, 141 97, 454187, F17C 506, F17C 1304

Patent

active

059379189

ABSTRACT:
A gas filling facility and method which maintains the purity of a gas to be filled. A connection of a gas supply pipe and a gas filling pipe attached on gas containers is performed in a first clean room while the storage of the gas filling pipe occurs in a second clean room. When the gas filling pipe is stored, ultra-high purity nitrogen gas is caused to flow through the inside thereof, so that the inside of the gas filling pipe remains under an extremely clean state.

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patent: 5735321 (1998-04-01), Martyn et al.

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