Gas filling apparatus for photomask box

Details Gas filling apparatus for photomask box Gas filling apparatus for photomask box

2006-10-03

2010-12-07

Maust, Timothy L (Department: 3751)

Fluent material handling, with receiver or receiver coacting mea

With soil removing, coating, lubricating, sterilizing and/or...

With cleaning, coating or drying means

C141S011000, C141S063000, C141S089000, C141S098000, C206S217000

Reexamination Certificate

active

07845374

ABSTRACT:
A gas filling apparatus used to fill a photomask box with gas such as nitrogen or other inert gas. The gas filling apparatus of the present invention has a gas filling chamber provided with a plurality of first pillared elements, a plurality of second pillared elements, at least one gas inlet, at least one gas outlet, and a plurality of clamping elements; wherein the first pillared elements are used to couple with the recesses on a cover member of the photomask box, the second pillared elements are used to prop against the peripheral of a cover member of the photomask box, and the clamping elements respectively prop against two opposite sides of the cover member of photomask box, whereby the gas inlets and the gas outlets are respectively coupled with the through holes formed on the lower cover member of the photomask box and the gas can be filled into and exhausted from the photomask box.

REFERENCES:
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patent: 6307728 (2001-10-01), Leeser
patent: 6368411 (2002-04-01), Roberson et al.
patent: 7360346 (2008-04-01), Miyajima et al.
patent: 7520286 (2009-04-01), Davis et al.

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