Fluid sprinkling – spraying – and diffusing – Combining of separately supplied fluids – At or beyond outlet
Patent
1988-01-27
1989-11-14
Kashnikow, Andres
Fluid sprinkling, spraying, and diffusing
Combining of separately supplied fluids
At or beyond outlet
239555, 239568, B05B 114
Patent
active
048801631
ABSTRACT:
A gas feeding nozzle feeds at least one kind of gas to form a thin film on a substrate by a normal pressure vapor deposition process. The nozzle is constituted by a plurality of plate-like bodies. A single or a plurality of slit-like gas discharging apertures are formed by stacking spacers each having at least one cut portion in the gas-discharging direction and partition plates for separating a stream of gas from another stream of gas adjacently flowing. A gas supplying plate with at least one gas supplying opening and at least one groove for flowing the gas in its width direction is attached on at least one of the outermost plate-like bodies. In order to form a single or a plurality of gas feeding paths between the gas supplying plate and the spacer for forming the gas discharging aperture, a single or a plurality of elongated holes, which are extended to the substantially entire width with respect to the width of the gas stream discharged, are formed in the partition plates and the spacers interposed between the gas supplying plate and the spacer.
REFERENCES:
patent: 2685916 (1954-08-01), Maztt
patent: 2713894 (1955-07-01), Sage
patent: 3381114 (1968-04-01), Nakanuma
patent: 3606974 (1971-09-01), Steele
patent: 3790087 (1974-02-01), Basyas et al.
patent: 4081136 (1978-03-01), Addoms et al.
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patent: 4351861 (1982-09-01), Henery
Thin Solid Films, vol. 77, Nos. 1,3, 1981, pp. 51-63, Elsevier Sequoia, NL; J. M. Blocher, Jr.: "Coating of glass by chemical vapor deposition".
Kobayashi Shigeyoshi
Takigawa Tomoya
Yaba Susumu
Asahi Glass Company Ltd.
Kashnikow Andres
Weldon Kevin P.
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