Gas evolution component analysis

Details Gas evolution component analysis Gas evolution component analysis

1994-09-29

1995-08-15

Berman, Jack I.

Radiant energy

Ionic separation or analysis

With sample supply means

250282, 7386312, 7386483, H01J 4904

Patent

active

054421756

ABSTRACT:
A method and apparatus for analyzing chemical compounds on a surface, such as the surface of a semiconductor wafer, comprising: a heater component for volatilizing the chemical compounds from the surface and capturing said volatilized compounds, a condensation surface having a hot end and a cold end and a thermal gradient therebetween, means for causing said volatilized chemical compounds to flow along said condensing surface so as to sequentially condense said chemical compounds and an exciter/analyzer for sequentially analyzing said condensed chemical compounds. The exciter/analyzer can comprise an ion beam, laser, or similar exciting device, coupled with a mass analyzer. The exciter/analyzer preferably scans the condensing surface from the hot end to the cold end and withdraws molecules for analysis as they are excited from the surface.

REFERENCES:
patent: 4259572 (1981-03-01), Brunnee et al.
patent: 5191211 (1993-03-01), Gorman
McGee et al., The Review of Scientific Instruments, vol. 37, No. 5, May 1966, pp. 561-566.

Affiliated with

Also associated with

Rating

Gas evolution component analysis does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gas evolution component analysis, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas evolution component analysis will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2183673