Gas-driven fluid flow control valve and cryopump incorporating t

Details Gas-driven fluid flow control valve and cryopump incorporating t Gas-driven fluid flow control valve and cryopump incorporating t

1981-07-06

1982-07-20

Capossela, Ronald C.

Refrigeration

Gas compression, heat regeneration and expansion, e.g.,...

137 2537, F25B 900

Patent

active

043399274

ABSTRACT:
A gas-driven fluid flow control valve capable of responding to a signal to alter the direction of fluid flow therethrough. When the valve is interposed between high- and low-pressure fluid reservoirs on one side and a cryogenic refrigerator requiring the supplying of high-pressure fluid and the discharging of low-pressure fluid on the other side, it may be used to reverse the flow of fluid through the refrigerator to switch it from a cooling to a warming mode. The incorporation of such a refrigerator into a cryopump in conjunction with the gas-driven valve makes it possible to rapidly warm up the condensing and adsorbing surfaces of the cryopump thus reducing the regeneration cycle of the cryopump from several hours to about 30 to 35 minutes.

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