X-ray or gamma ray systems or devices – Source
Reexamination Certificate
2006-05-08
2009-12-08
Yun, Jurie (Department: 2882)
X-ray or gamma ray systems or devices
Source
C378S144000, C250S50400H
Reexamination Certificate
active
07630475
ABSTRACT:
A gas discharge source for EUV radiation and/or soft X-ray radiation is arranged in a vacuum chamber and includes at least two electrodes, each with a circular periphery and rotatably mounted for rotation. At one spatial position, the electrodes have a small spacing for the ignition of a gas discharge and are each connected to a reservoir for a liquid, electrically conductive material. During rotation, a liquid film of the electrically conductive material forms over the circular periphery of the electrodes and a flow of current to the electrodes is made possible. The electrodes connect to the reservoirs via a respective connecting element, wherein a gap is formed between electrode and connecting element over a partial section of the circular periphery of each electrode. The liquid material can penetrate from the reservoir and into the gap during rotation of the electrode via a feed channel formed in the connecting element.
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Neff Jakob Willi
Pruemmer Ralf
Koninklijke Philips Electronics , N.V.
Yun Jurie
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