Coherent light generators – Particular temperature control
Patent
1999-05-12
2000-03-07
Scott, Jr., Leon
Coherent light generators
Particular temperature control
372 59, 372 57, H01S 304
Patent
active
060349786
ABSTRACT:
A gas discharge laser with fast response gas temperature control to maintain laser gas temperature within desired limits during burst mode operation. Preferred embodiments include a passive temperature stabilizer having fins with surface areas exposed to flowing laser gas at least equal to the surface area of the cooling fins of a laser gas heat exchanger. Preferred embodiments utilize heating elements and coolant flow control to regulate laser gas temperatures using processors programmed to anticipate idle periods.
REFERENCES:
patent: 5377215 (1994-12-01), Das et al.
patent: 5748656 (1998-05-01), Watson et al.
Azzola James H.
Berger Dmitry
Duffey Thomas P.
Fomenkov Igor V.
Harrington Steven M.
Cymer Inc.
Jr. Leon Scott
Ross, Esq. John R.
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