Gas discharge laser having a buffer gas of neon

Details Gas discharge laser having a buffer gas of neon Gas discharge laser having a buffer gas of neon

1981-11-03

1983-07-12

Davie, James W.

Coherent light generators

Particular active media

Gas

372 60, H01S 322

Patent

active

043935052

ABSTRACT:
The output power and efficiency of a gas discharge laser is substantially improved by the substitution of neon (Ne) for helium (He) as a buffer in the lasing medium. One embodiment of the invention is a pulsed excimer laser having a lasing gas comprising a mixture of krypton (Kr) and fluorine (F.sub.2). Use of Ne with the KrF excimer lasing medium further enables advantageous utilization of corona wire pre-ionization to initiate the main discharge of this type of laser.

REFERENCES:
patent: 3934211 (1976-01-01), Sucov et al.
patent: 4307351 (1981-12-01), Oomen et al.
D. E. Rothe et al., "Analysis of a Spark-Preionized Large-Volume XeF and KrF Discharge Laser", Optics Communications, vol. 22, No. 3, Sep. 1977, pp. 265-268.
M. Rokni et al., "Absorption in Ne- and Ar-Rich XeF* Laser Mixtures", Appl. Phys. Lett., vol. 32, No. 10, May 15, 1978, pp. 622-624.

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