Gas discharge lamp for extreme UV radiation

Details Gas discharge lamp for extreme UV radiation Gas discharge lamp for extreme UV radiation

2008-07-08

2008-07-08

Patel, Ashok (Department: 2889)

Electric lamp and discharge devices

With gas or vapor

Having hollow cathode

C313S491000, C313S574000, C313S326000, C313S299000

Reexamination Certificate

active

07397190

ABSTRACT:
The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3′) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5′) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).

REFERENCES:
patent: 5467362 (1995-11-01), Murray
patent: 6452194 (2002-09-01), Bijkerk et al.
patent: 2002/0168049 (2002-11-01), Schriever et al.
patent: WO 01 01736 (2001-01-01), None
patent: WO 0191532 (2001-11-01), None

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