Gas discharge lamp

Details Gas discharge lamp Gas discharge lamp

2008-01-29

2008-01-29

Kim, Robert (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

Reexamination Certificate

active

10525136

ABSTRACT:
A gas discharge lamp for the wavelength range of extreme ultraviolet radiation and/or soft X-ray radiation has at least two electrodes for providing a radiaton-emitting plasma in the intervening discharge space. One of the electrodes has a continuous opening to an adjoining outer region where charge carriers can be generated which can be transported through the opening in to the discharge space. The electrode opening narrows in the direction of the outer region.

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