Gas delivery panels

Details Gas delivery panels Gas delivery panels

1991-11-26

1992-11-17

Cohan, Alan

Fluid handling

Systems

Multiple inlet with multiple outlet

137861, F17C 700

Patent

active

051634759

ABSTRACT:
A micropanel for the delivery of gas from a supply cylinder to a tool location comprises an arrangement of valves, pressure regulator and associated components adapted to enhance the purity of the delivered gas and the safety of the gas delivery panel.

REFERENCES:
patent: 4489721 (1984-12-01), Ozaki
patent: 4597416 (1986-07-01), Scales
patent: 4685156 (1987-08-01), Brabazon
"Purge Panels", 1989, Flopure, Inc., pages 2 (total).
"Ceodeux", Since 1922-Technology, pages 5 (total) Gas Systems.
"Answering the Challenge for You", AT Series Manual Gas Control Manifolds for Ultra-High Purity Toxic, Flammable and Corrosive Gases, Semi Gas Systems, Inc., 1986, pages 6 (total).
SDC UHP High Pressure Cylinder Source Gas Panel, SDC 2190-13, Nov. 1990, pages 2 (total).

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