Gas-damped micromechanical structure

Details Gas-damped micromechanical structure Gas-damped micromechanical structure

1997-03-12

1998-07-28

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

G02B 2600

Patent

active

057869278

ABSTRACT:
An improved squeeze-type micromechanical structure for high speed operation, i.e., greater than 1 MHz, is disclosed. The structure has a movable member possessing damping holes. The porosity, 1/(.omega..sub.o .tau.), of the movable member is at least about 1.4. The structure is hermetically sealed and is maintained above atmospheric pressure and at a minimum reduced pressure or gas frequency, .omega..sub.g /.omega..sub.o, of about 1.3. To operate with less than 10 percent "ringing," .omega..sub.g /.omega..sub.o >1.3 and 0.25+0.7(.omega..sub.g /.omega..sub.o).sup.2 -0.8(.omega..sub.g /.omega..sub.o -1.25).ltoreq.1/(.omega..sub.o .tau.).ltoreq.0.25+0.7(.omega..sub.g /.omega..sub.o).sup.2 +(.omega..sub.g /.omega..sub.o -1.25).

REFERENCES:
patent: 5280173 (1994-01-01), Morse et al.

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