Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-12-04
2009-08-18
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
07576833
ABSTRACT:
A gas curtain type immersion lithography apparatus has a fluid removing porous region adjacent the gas inlet to prevent evaporative cooling. The apparatus includes a substrate holder which holds a substrate having an imaging surface and a projection optical system having a last optical element. The projection optical system projects an image onto a target imaging area on the substrate through an immersion fluid filled in a gap between the imaging surface of the substrate and the last optical element. An immersion element maintains the immersion fluid in the gap. Gas is provided through an inlet into the gap. A porous region is provided adjacent the gas inlet. Immersion fluid that collects near the gas inlet is removed by the porous region.
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Refractron Technologies Corp. Product Literature: Porous Ceramics and Specifications.
Coon Derek
Keswani Gaurav
Kho Leonard Wai Fung
Poon Alex Ka Tim
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
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