Gas controlling device for integration

Fluid handling – With repair – tapping – assembly – or disassembly means – Assembling – disassembling – or removing cartridge type valve

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Details

137549, 137884, 251331, F16K 714, F16K 4300

Patent

active

060736461

ABSTRACT:
The present invention relates to a gas controlling device for integration such that it can be simply removed or mounted without disassembling a gas line in a high purity gas supply system for a semiconductor. The gas controlling device for integration comprises a main body which is vertically constituted and has a gas inlet passage and a gas outlet passage formed in a lower body, a nut mounted on an outer periphery of the lower body, a passage block having a gas inlet passage and a gas outlet passage, and a sealing means disposed between the lower body and the passage block. The lower body is inserted into the mounting hole of the passage block and is fixed to the passage block by screwing the nut. Since the gas controlling device for integration is fixed to the passage block by screwing the nut mounted on the outer periphery of the lower body, it can be removed or mounted only by loosening or tightening one nut without disassembling the gas line.

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patent: 2520092 (1950-08-01), Frederickson et al.
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patent: 5253671 (1993-10-01), Kolenc
patent: 5337785 (1994-08-01), Romer
patent: 5524865 (1996-06-01), Uchisawa et al.
patent: 5653419 (1997-08-01), Uchisawa et al.
patent: 5819782 (1998-10-01), Itafuji

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