Gas containment and delivery system

Details Gas containment and delivery system Gas containment and delivery system

1996-07-02

1999-11-23

Chambers, A. Michael

Fluid handling

With casing, support, protector or static constructional...

Guards and shields

137360, 137377, 137362, F16L 300

Patent

active

059882085

ABSTRACT:
A gas containment and delivery system that can be efficiently and cost-effectively adapted to a wide variety of gas delivery needs. The system has a gas containment box that can be efficiently adapted to provide double containment for sections of toxic gas lines having gas delivery components such as valves, regulators, and gauges. The system may be either floor-mounted or wall-mounted, and can be used in a wide variety of semiconductor fabrication facilities.

REFERENCES:
patent: 3136442 (1964-06-01), Massey
patent: 3831625 (1974-08-01), Roediger
patent: 5522420 (1996-06-01), Martin
patent: 5687757 (1997-11-01), Heintz et al.

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