Gas circulation fan for excimer laser apparatus

Details Gas circulation fan for excimer laser apparatus Gas circulation fan for excimer laser apparatus

2005-05-24

2005-05-24

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular active media

Gas

C372S078000

Reexamination Certificate

active

06898229

ABSTRACT:
In a gas circulation fan, a main shaft is supported in a non-contact manner, by magnetic bearings. Between each of the magnetic bearings and a controller, a relay is provided. Each relay includes a position detection sensor circuit, an offset adjuster, a feedback gain adjuster and a filter circuit. Thus, compatibility between a mechanical body unit and the controller is attained.

REFERENCES:
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patent: 6337872 (2002-01-01), Nara et al.
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patent: 6700235 (2004-03-01), McAfee
patent: 6809448 (2004-10-01), Suzuki et al.
patent: 6813301 (2004-11-01), Ozaki et al.
patent: 11-303793 (1999-11-01), None

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