Gas chromatography system and detector and method

Details Gas chromatography system and detector and method Gas chromatography system and detector and method

1982-03-22

1984-09-18

Kreitman, Stephen A.

Measuring and testing

Gas analysis

Gas chromatography

73 231, 338 25, 374135, G01N 2718

Patent

active

044716478

ABSTRACT:
There is described a gas chromatographic assembly formed on a semiconductor wafer by etching techniques. There is also described an improved thermal detector for use therewith.

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K. Malin et al., "Mass Flow Meter", IBM Technical Disclosure Bulletin, vol. 21, No. 8, p. 3227, Jan. 1979.
G. C. Carle et al., "Microminiature Gas Chromatograph," NASA Tech. Brief B7210306, pp. 1 and 2, Sep. 1972.
S. C. Terry, "Gas Chromatography System Fabricated on Silicon Wafer Using Integrated Circuit Tech.," Stanford Electronics Lab, Tech. Report 4603-1, pp. 1-128, May 1975.
S. C. Terry et al., "Feasibility Study of Pocket-Sized Gas Chromatographic Air Analyzer," Stanford Electronics Lab, pp. 1-102, Jul. 1977.
Seiyama et al., "Study on a Detector for Gaseous Components Using Semiconductive Thin Films," Anal. Chem., vol. 38, No. 8, pp. 1069-1072, Jul. 1966.

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