Optical: systems and elements – Lens – Fluid
Reexamination Certificate
1999-01-15
2001-11-06
Lester, Evelyn A (Department: 2873)
Optical: systems and elements
Lens
Fluid
C438S909000, C250S492200, C118S722000, C430S128000, C430S331000
Reexamination Certificate
active
06313953
ABSTRACT:
FIELD OF THE INVENTION
This disclosure relates generally to methods using both filters and systems using filters. More specifically, this disclosure describes methods and systems for achieving optimal light transmittance at a specified wavelength or range of wavelengths through a gas and light transmittance region.
BACKGROUND
In the semiconductor industry, semiconductors are fabricated using a combination of lenses and other optical equipment. In many instances, it can be important to keep the lenses, optical equipment, and light transmission clear in order to achieve a quality image at a specified wavelength or range of wavelengths.
SUMMARY OF THE DISCLOSURE
This disclosure is directed to a method of achieving optimal light transmittance through a gas and light transmittance region. The method may include directing a method of optimal light transmittance through a gas and light transmittance region; the method including (a) selecting a media based on a desired light transmission wavelength; (b) directing a gas through the media to at least partially remove gaseous contaminants therefrom resulting in a purified gas; (c) directing the purified gas into a light transmission region; and (e) transmitting light through the light transmission region and purified gas.
Another aspect of the disclosure concerns a system for optimal light transmittance through a gas and a light transmittance region. One such system may include a filter construction for removing contaminants from the gas. The filter construction preferably includes a housing including and inlet connectable to a supply of gas and an outlet for exhausting gas received from the supply of gas. The filter construction also includes media. The media is selected accordingly to a desired operational light wavelength. The system also includes an illumination system for transmitting light through a light transmission region and the purified gas. The light transmission region is in gas flow communication with the filter outlet.
This invention is directed at the application of specific activated carbon based materials for the protection of imaging lenses which are targeting optimal transmittance at specific wavelengths. Specifically, it outlines a use of a specific type of carbon to obtain improved/constant transmittance at a specific wavelength or range of wavelengths. In addition, it also presents the use of a mixture of activated carbon types in order to obtain improved/constant transmissions over a broad range of wavelengths.
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Donaldson & Company, Inc.
Lester Evelyn A
Merchant & Gould P.C.
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