Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate
2005-06-21
2005-06-21
Doerrler, William C. (Department: 3744)
Refrigeration
Low pressure cold trap process and apparatus
C062S048100
Reexamination Certificate
active
06907740
ABSTRACT:
An apparatus and method for charging a gas storage and dispensing vessel with gas to a predetermined pressure level, e.g., a gas to be employed in a semiconductor manufacturing operation such as a hydride, halide or organometallic reagent gas. In the gas charging, a source gas is liquefied, e.g., in a cryotrap, and then gasified in closed flow communication with the vessel to introduce the gas thereinto, and such liquefaction/gasification steps are carried out alternatively and repetitively, to charge the vessel in a step-wise, progressive fashion with gas, until a full fill state is achieved, with the contained gas at the predetermined pressure level.
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Advanced Technology & Materials Inc.
Chappuis Margaret
Doerrler William C.
Hultquist Steven J.
Yang Yongzhi
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