Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2005-01-18
2005-01-18
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S072000, C250S492100
Reexamination Certificate
active
06844922
ABSTRACT:
A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing
REFERENCES:
patent: 4118042 (1978-10-01), Booth
patent: 4191385 (1980-03-01), Fox et al.
patent: 4229655 (1980-10-01), Ryding
patent: 4726689 (1988-02-01), Pollock
patent: 5218896 (1993-06-01), Furukawa
patent: 5898179 (1999-04-01), Smick et al.
patent: 6038015 (2000-03-01), Kawata
patent: 6274875 (2001-08-01), Smick et al.
patent: 6323496 (2001-11-01), Sakase et al.
patent: 6337484 (2002-01-01), Loopstra et al.
patent: 6421112 (2002-07-01), Bisschops et al.
patent: 6445440 (2002-09-01), Bisschops et al.
patent: 1 089 001 (2001-04-01), None
patent: WO 9828665 (1998-07-01), None
patent: WO 9840791 (1998-09-01), None
patent: WO 9966221 (1999-12-01), None
Ceglio et al., “Front-end design issues in soft-x-ray projection lithography,”Applied Optics, Optical Society of America, Washington, US, vol. 32, no. 34, Dec. 1, 1993, pp. 7050-7056 (Abstract No. XP000414608 ISSN: 0003-6935).
Bisschops Theodorus H. J.
Bouwer Adrianus G.
Driessen Johannes C.
Renkens Michael J. M.
Soemers Hermanus M. J. R.
ASML Netherlands B.V.
Kim Peter B.
Pillsbury & Winthrop LLP
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