Gas bearing, and lithographic apparatus provided with such a...

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper

Reexamination Certificate

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C310S012310, C355S053000, C355S075000, C355S077000, C384S008000, C384S012000

Reexamination Certificate

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07978307

ABSTRACT:
A gas bearing has a first bearing part defining a first bearing surface and a second bearing part defining a second bearing surface. Between the first bearing surface and the second bearing surface there is a gap. A gas supply device supplies a gas to the gap. The first bearing part is at least partly ferromagnetic, and the second bearing part has at least one permanent magnet interacting with the first bearing part for pre-tensioning the gas bearing. The gas bearing may be part of a lithographic apparatus.

REFERENCES:
patent: 3885504 (1975-05-01), Baermann
patent: 5098203 (1992-03-01), Henderson
patent: 5821981 (1998-10-01), Menard et al.
patent: 6304320 (2001-10-01), Tanaka et al.
patent: 6320649 (2001-11-01), Miyajima et al.
patent: 7088429 (2006-08-01), Ohishi
patent: 7385679 (2008-06-01), Dams
patent: 2004/0174080 (2004-09-01), Beyer et al.
patent: 2005/0084187 (2005-04-01), Kimura
patent: 8-177856 (1996-07-01), None
patent: 10-199803 (1998-07-01), None
patent: 2002-333018 (2002-11-01), None
patent: 2005-033214 (2005-02-01), None
patent: 2005-116627 (2005-04-01), None
patent: 2007-219310 (2007-08-01), None
Notice of Reasons for Rejection mailed Apr. 21, 2010 for Japanese Patent Application No. 2007-113701, 5 pgs.

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