Measuring and testing – Gas analysis
Reexamination Certificate
2006-11-21
2009-12-01
Larkin, Daniel S (Department: 2856)
Measuring and testing
Gas analysis
Reexamination Certificate
active
07624617
ABSTRACT:
A gas analyzing system is disclosed, the system including a gas analyzer and a reduced pressure chamber in which interior the gas analyzer is arranged, the reduced pressure chamber having an inlet configuration for a gas mixture inflow and an outlet configuration for a gas mixture outflow, wherein the outlet configuration during operation is connected to a pump system to facilitate the gas mixture outflow, the outlet configuration having a channel section and a flow section, the flow section having a cross-sectional area that is smaller than the cross-sectional area of the channel section.
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Koster Norbertus Benedictus
Paarhuis Bart Dinand
Versluis Richard
ASML Netherlands B.V.
Larkin Daniel S
Sterne Kessler Goldstein & Fox P.L.L.C.
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