Measuring and testing – Gas analysis – With compensation detail
Patent
1997-08-20
1998-11-24
Williams, Hezron E.
Measuring and testing
Gas analysis
With compensation detail
73 2341, 7386483, 422 88, 422 93, G01N 3020
Patent
active
058410228
ABSTRACT:
The present invention provides a gas analyzer used for contamination control of a clean environment by collecting samples from a plurality of measurement points while switching these points and continuously monitoring the volatile components present in the air of the environment, which analyzer requires no increase in number of parts and can give good response in a short period of measurement; and a gas analysis method using the gas analyzer.
The gas analyzer of the present invention has two gas sampling units. Each of solution-feeding pumps 3, 15 is actuated for a different diffusion scrubber. The diffusion scrubber connected to the solution-feeding pump 15 is put in a measurement state; and the to-be-analyzed gas components absorbed by the absorbing solution in the diffusion scrubber are captured by a concentration column 14 and are analyzed by an ion chromatograph 30. During this period, a preliminary operation is conducted, in parallel, in the other diffusion scrubber connected to the solution-feeding pump 3. Thus, the adverse effect of the previous analysis by memory effect is prevented; response is improved; and the period of measurement is shortened.
REFERENCES:
patent: 3926561 (1975-12-01), Lucero
patent: 3976450 (1976-08-01), Marcote et al.
patent: 4271695 (1981-06-01), Sisti et al.
patent: 4359891 (1982-11-01), Ahlstrom, Jr. et al.
patent: 4472354 (1984-09-01), Passel et al.
patent: 5073502 (1991-12-01), Steele, Jr.
patent: 5152176 (1992-10-01), Bryselbout et al.
patent: 5352272 (1994-10-01), Moll et al.
patent: 5591406 (1997-01-01), Hirai et al.
patent: 5714676 (1998-02-01), Hase
Ushio Hase, "Automatic Monitor for Ammonia in Clean Room Air", The Fifth International Symposium on Semiconductor Manufacturing, pp. 151-154.
NEC Corporation
Wiggins J. David
Williams Hezron E.
LandOfFree
Gas analyzer and gas analysis method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Gas analyzer and gas analysis method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas analyzer and gas analysis method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1704789