Gas analysis or leak detection process and device for same

Details Gas analysis or leak detection process and device for same Gas analysis or leak detection process and device for same

1995-12-20

1998-05-26

Brock, Michael

Measuring and testing

With fluid pressure

Leakage

G01M 320

Patent

active

057568812

ABSTRACT:
A process and device for gas analysis has an input for a gas analyzer which is meant for connection to a vacuum pump. At least a portion of the gas to be analyzed is supplied at the inlet by applying a pump flux to the inlet. Superimposed on the pump flux is a further gas flux which is supplied over one or more gas line segments at a non-molecular flow-dominant flowrate.

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patent: 5341671 (1994-08-01), Beret et al.
patent: 5537857 (1996-07-01), Grosse Bley

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