Gas adsorber for exhaust gas

Details Gas adsorber for exhaust gas Gas adsorber for exhaust gas

1991-12-07

1992-12-08

Spitzer, Robert

Gas separation

With nonliquid cleaning means for separating media

Solid agent cleaning member movingly contacts apparatus

55387, B01D 5304

Patent

active

051694190

ABSTRACT:
A gas adsorber which is capable of reliably removing harmful gases discharged from processes in the semiconductor industry, the ceramic industry, etc. The gas adsorber has an integral structure comprising a main treating section having an exhaust gas inlet port and packed with an adsorbent, an auxiliary treating section having a treated gas outlet port and packed with an adsorbent, and a space section provided in between the main and auxiliary treating sections, the space section having a gas outlet port and a gas return port, which provide communication between the space section and a gas sensor. With this arrangement, the adsorption conditions in the main treating section can be perceived accurately.

REFERENCES:
patent: 3773044 (1973-11-01), Wallace
patent: 3897226 (1975-07-01), Doherty
patent: 3976050 (1976-08-01), Glasser et al.
patent: 4095965 (1978-06-01), Neumann et al.
patent: 4197098 (1980-04-01), Stiehl et al.
patent: 4278453 (1981-07-01), Klein
patent: 4516988 (1985-05-01), Winter
patent: 4999035 (1991-03-01), Warndorf

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