Catalyst – solid sorbent – or support therefor: product or process – Solid sorbent – Organic
Patent
1987-10-07
1989-05-02
Garvin, Patrick P.
Catalyst, solid sorbent, or support therefor: product or process
Solid sorbent
Organic
502404, 423240, 55 71, 55 74, B01D 3900, B01D 5302, B01J 2000, B01J 2026
Patent
active
048268054
ABSTRACT:
An absorber that is capable of efficient absorption of SiF.sub.4 and/or BCl.sub.3 present in gases that are discharged from semiconductor fabrication plants, ceramic producing plants and other plants is disclosed. The absorber contains an alkali agent, water and a superabsorbent as effective components. This absorber, when used to treat an effluent gas, attains as high reaction rate as in the conventional wet process and can be handled as easily as in the dry process.
REFERENCES:
patent: 32392 (1987-04-01), Clark et al.
patent: 1818155 (1931-08-01), Oglesby et al.
patent: 4016242 (1977-04-01), Deitz et al.
Arimitsu Hidenobu
Fukunaga Akira
Shiota Toshihiko
Yasuhara Yoshiharu
Ebara Corporation
Ebara Research Co. Ltd.
Garvin Patrick P.
Irzinski E. D.
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