Gap measuring device for defining the distance between two or mo

Details Gap measuring device for defining the distance between two or mo Gap measuring device for defining the distance between two or mo

1976-06-11

1978-01-24

Sacher, Paul A.

Optics: measuring and testing

Angle measuring or angular axial alignment

With photodetection remote from measured angle

250201, 356167, G01B 900

Patent

active

040701166

ABSTRACT:
Disclosed is an apparatus for measuring the distance between two or more surfaces by means of a periodically shiftable imaging system and focus detectors.

REFERENCES:
patent: 3327584 (1967-06-01), Kissinger
patent: 3715165 (1973-07-01), Smith
Frosch et al., "Optical Surface Microtopography Measurement &/or Automatic Focussing", IBM. Tech. Disc. Bull. vol. 15, 7-1972, pp. 504-505.
Frosch, A. "Optical Gapmeter", IBM Tech. Disc. Bull. vol. 16, 3-1974, p. 3284.

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