Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
Reexamination Certificate
2007-09-07
2010-06-29
Cheung, William K (Department: 1796)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Mixing of two or more solid polymers; mixing of solid...
C525S328800, C525S328900, C526S217000, C526S317100, C526S219500, C526S319000
Reexamination Certificate
active
07745540
ABSTRACT:
New anti-reflective or fill compositions having improved flow properties are provided. The compositions comprise a dendritic polymer dispersed or dissolved in a solvent system, and preferably a light attenuating compound, a crosslinking agent, and a catalyst. The inventive compositions can be used to protect contact or via holes from degradation during subsequent etching in the dual damascene process. The inventive compositions can also be applied to substrates (e.g., silicon wafers) to form anti-reflective coating layers having high etch rates which minimize or prevent reflection during subsequent photoresist exposure and developing.
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Bhave Mandar
Devadoss Chelladurai
Huang Runhui
Brewer Science Inc.
Cheung William K
Hovey & Williams, LLP
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