Gap adjustment apparatus and gap adjustment method for...

Details Gap adjustment apparatus and gap adjustment method for... Gap adjustment apparatus and gap adjustment method for...

2005-02-08

2005-02-08

Noland, Thomas P. (Department: 2856)

Radiant energy

Means to align or position an object relative to a source or...

C269S045000, C700S302000

Reexamination Certificate

active

06852988

ABSTRACT:
A first stage and a second stage are disposed to face each other. A first object is fixed on the first stage. A first displacement sensor attached on the first stage is used to measure a distance extending from the first displacement sensor to a plane disposed in front of the first displacement sensor. A second object is fixed on the second stage. A second displacement sensor attached on the second stage is used to measure a distance extending from the second displacement sensor to a plane disposed in front of the second displacement sensor. A moving mechanism is provided to move one of the first stage and the second stage, with the movement of one stage being relative to the other stage.

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